zen_api/em/hardware/v1/electron_column_service.proto

Version: 2026.5.1

Package: zen_api.em.hardware.v1

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Service ElectronColumnService

The IElectronColumnService interface.

GetActualVoltage

Retrieves the current eht/voltage.

rpc GetActualVoltage (zen_api.em.hardware.v1.ElectronColumnServiceGetActualVoltageRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetActualVoltageResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetActualVoltageRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetActualVoltageResponse

GetApertureAlign

Gets the aperture align in percentage.

rpc GetApertureAlign (zen_api.em.hardware.v1.ElectronColumnServiceGetApertureAlignRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetApertureAlignResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetApertureAlignRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetApertureAlignResponse

GetBeamBlankerState

Gets the beam blanker state.

rpc GetBeamBlankerState (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamBlankerStateRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamBlankerStateResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamBlankerStateRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamBlankerStateResponse

GetBeamShift

Gets the current beam shift in meters.

rpc GetBeamShift (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftResponse

GetBeamShiftLimits

Gets the limits of the beam shiftin meters.

rpc GetBeamShiftLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamShiftLimitsResponse

GetBeamState

Retrieves the current beam working state.

rpc GetBeamState (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamStateRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetBeamStateResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamStateRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetBeamStateResponse

GetBoosterVoltage

Gets the booster voltage in volts.

rpc GetBoosterVoltage (zen_api.em.hardware.v1.ElectronColumnServiceGetBoosterVoltageRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetBoosterVoltageResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetBoosterVoltageRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetBoosterVoltageResponse

GetEhtOffset

Gets the eht offset in volts.

rpc GetEhtOffset (zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetResponse

GetEhtOffsetLimits

Gets the limits of the eht offset in volts.

rpc GetEhtOffsetLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetEhtOffsetLimitsResponse

GetFocus

Gets the current focus (working distance) in meters.

rpc GetFocus (zen_api.em.hardware.v1.ElectronColumnServiceGetFocusRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFocusResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFocusRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFocusResponse

GetFocusLimits

Gets the limits of the current focus (working distance) in meters.

rpc GetFocusLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetFocusLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFocusLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFocusLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFocusLimitsResponse

GetFov

Retrieves the current Field Of View.

rpc GetFov (zen_api.em.hardware.v1.ElectronColumnServiceGetFovRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFovResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFovRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFovResponse

GetFovLimits

Gets the limits of the Field Of View in meters.

rpc GetFovLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetFovLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFovLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFovLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFovLimitsResponse

GetFovRotation

Gets the rotation of the Field Of View.

rpc GetFovRotation (zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationResponse

GetFovRotationLimits

Gets the limits of the Field Of View rotation in radians.

rpc GetFovRotationLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetFovRotationLimitsResponse

GetObjectiveCurrent

Gets the objective current in amperes. The objective current controls the strength of the magnetic field of the lens.

rpc GetObjectiveCurrent (zen_api.em.hardware.v1.ElectronColumnServiceGetObjectiveCurrentRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetObjectiveCurrentResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetObjectiveCurrentRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetObjectiveCurrentResponse

GetProbeCurrent

Get the probe current.

rpc GetProbeCurrent (zen_api.em.hardware.v1.ElectronColumnServiceGetProbeCurrentRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetProbeCurrentResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetProbeCurrentRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetProbeCurrentResponse

GetSemiAngle

Gets the current semi angle in radians.

rpc GetSemiAngle (zen_api.em.hardware.v1.ElectronColumnServiceGetSemiAngleRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetSemiAngleResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetSemiAngleRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetSemiAngleResponse

GetSpotSize

Gets the spot size in meters.

rpc GetSpotSize (zen_api.em.hardware.v1.ElectronColumnServiceGetSpotSizeRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetSpotSizeResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetSpotSizeRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetSpotSizeResponse

GetStigmator

Gets the current stigmator x and y values in percent [0, 1].

rpc GetStigmator (zen_api.em.hardware.v1.ElectronColumnServiceGetStigmatorRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetStigmatorResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetStigmatorRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetStigmatorResponse

GetTargetVoltage

Retrieves the target eht/voltage.

rpc GetTargetVoltage (zen_api.em.hardware.v1.ElectronColumnServiceGetTargetVoltageRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetTargetVoltageResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetTargetVoltageRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetTargetVoltageResponse

GetVoltageLimits

Gets the limits of the voltage (EHT) in volts.

rpc GetVoltageLimits (zen_api.em.hardware.v1.ElectronColumnServiceGetVoltageLimitsRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGetVoltageLimitsResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGetVoltageLimitsRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGetVoltageLimitsResponse

GoToStandby

Bring the column into standby mode. This call triggers the column to go into standby mode. Emission will still be on.

rpc GoToStandby (zen_api.em.hardware.v1.ElectronColumnServiceGoToStandbyRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceGoToStandbyResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceGoToStandbyRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceGoToStandbyResponse

RegisterOnApertureAlignChanged

Register on aperture align changed events.

rpc RegisterOnApertureAlignChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnApertureAlignChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnApertureAlignChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnApertureAlignChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnApertureAlignChangedResponse

RegisterOnBeamBlankerStateChanged

Register on the beam blanker state changed events.

rpc RegisterOnBeamBlankerStateChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamBlankerStateChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamBlankerStateChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamBlankerStateChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamBlankerStateChangedResponse

RegisterOnBeamShiftChanged

Register on column beam shift changed events.

rpc RegisterOnBeamShiftChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamShiftChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamShiftChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamShiftChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamShiftChangedResponse

RegisterOnBeamStateChanged

Register on beam state changed events.

rpc RegisterOnBeamStateChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamStateChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamStateChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamStateChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnBeamStateChangedResponse

RegisterOnFocusChanged

Register on column focus (working distance) changed events.

rpc RegisterOnFocusChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFocusChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFocusChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFocusChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFocusChangedResponse

RegisterOnFovChanged

Register on column FOV changed events.

rpc RegisterOnFovChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovChangedResponse

RegisterOnFovRotationChanged

Register on FOV rotation changed events.

rpc RegisterOnFovRotationChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovRotationChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovRotationChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovRotationChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnFovRotationChangedResponse

RegisterOnProbeCurrentChanged

Register on column probe current changed events.

rpc RegisterOnProbeCurrentChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnProbeCurrentChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnProbeCurrentChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnProbeCurrentChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnProbeCurrentChangedResponse

RegisterOnSemiAngleChanged

Register on column semi angle changed events.

rpc RegisterOnSemiAngleChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSemiAngleChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSemiAngleChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSemiAngleChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSemiAngleChangedResponse

RegisterOnSpotSizeChanged

Register on beam spot size changed events.

rpc RegisterOnSpotSizeChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSpotSizeChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSpotSizeChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSpotSizeChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnSpotSizeChangedResponse

RegisterOnStigmatorChanged

Register on stigmator x and y changed events.

rpc RegisterOnStigmatorChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnStigmatorChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnStigmatorChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnStigmatorChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnStigmatorChangedResponse

RegisterOnVoltageChanged

Register on column (current/actual) eht/voltage changed events.

rpc RegisterOnVoltageChanged (zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnVoltageChangedRequest) returns (stream zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnVoltageChangedResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnVoltageChangedRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceRegisterOnVoltageChangedResponse

SetApertureAlign

Sets the eht offset.

rpc SetApertureAlign (zen_api.em.hardware.v1.ElectronColumnServiceSetApertureAlignRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetApertureAlignResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetApertureAlignRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetApertureAlignResponse

SetBeamBlankerState

Sets the beam blanker state.

rpc SetBeamBlankerState (zen_api.em.hardware.v1.ElectronColumnServiceSetBeamBlankerStateRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetBeamBlankerStateResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetBeamBlankerStateRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetBeamBlankerStateResponse

SetBeamShift

Set the beam shift of this column. Values can be null if they should not be updated.

rpc SetBeamShift (zen_api.em.hardware.v1.ElectronColumnServiceSetBeamShiftRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetBeamShiftResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetBeamShiftRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetBeamShiftResponse

SetEhtOffset

Sets the eht offset.

rpc SetEhtOffset (zen_api.em.hardware.v1.ElectronColumnServiceSetEhtOffsetRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetEhtOffsetResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetEhtOffsetRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetEhtOffsetResponse

SetFocus

Applies a new focus (working distance) to the column.

rpc SetFocus (zen_api.em.hardware.v1.ElectronColumnServiceSetFocusRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetFocusResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetFocusRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetFocusResponse

SetFov

Applies a new FOV.

rpc SetFov (zen_api.em.hardware.v1.ElectronColumnServiceSetFovRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetFovResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetFovRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetFovResponse

SetFovRotation

Rotates the Field Of View. If scan rotation is not enabled, it would be enabled.

rpc SetFovRotation (zen_api.em.hardware.v1.ElectronColumnServiceSetFovRotationRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetFovRotationResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetFovRotationRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetFovRotationResponse

SetObjectiveCurrent

Sets the objective current, that controlls the strength of the magnetic field of the lens.

rpc SetObjectiveCurrent (zen_api.em.hardware.v1.ElectronColumnServiceSetObjectiveCurrentRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetObjectiveCurrentResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetObjectiveCurrentRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetObjectiveCurrentResponse

SetProbeCurrent

Set the probe current.

rpc SetProbeCurrent (zen_api.em.hardware.v1.ElectronColumnServiceSetProbeCurrentRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetProbeCurrentResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetProbeCurrentRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetProbeCurrentResponse

SetStigmator

Applies a new stigmator x and / or y value to the column.

rpc SetStigmator (zen_api.em.hardware.v1.ElectronColumnServiceSetStigmatorRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetStigmatorResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetStigmatorRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetStigmatorResponse

SetVoltage

Applies a new target eht/voltage to the column.

rpc SetVoltage (zen_api.em.hardware.v1.ElectronColumnServiceSetVoltageRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceSetVoltageResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceSetVoltageRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceSetVoltageResponse

TurnOff

Turns the column off. This call initiates ramping down of emission and brings the column into off state.

rpc TurnOff (zen_api.em.hardware.v1.ElectronColumnServiceTurnOffRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceTurnOffResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceTurnOffRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceTurnOffResponse

TurnOn

Bring the column into working mode. This call initiates ramping of emission and brings the column into working condition.

rpc TurnOn (zen_api.em.hardware.v1.ElectronColumnServiceTurnOnRequest) returns (zen_api.em.hardware.v1.ElectronColumnServiceTurnOnResponse);

Request: zen_api.em.hardware.v1.ElectronColumnServiceTurnOnRequest

Response: zen_api.em.hardware.v1.ElectronColumnServiceTurnOnResponse

Message ElectronColumnServiceGetActualVoltageRequest

The ElectronColumnServiceGetActualVoltageRequest class.

Message ElectronColumnServiceGetActualVoltageResponse

Response object representing the eht/voltage.

Field	Number	Type	Presence	Description
voltage	1	double	singular	The eht/voltage in volts.

Message ElectronColumnServiceGetApertureAlignRequest

The ElectronColumnServiceGetApertureAlignRequest class.

Message ElectronColumnServiceGetApertureAlignResponse

Response object describing the aperture align values.

Field	Number	Type	Presence	Description
x	1	double	singular	The x aperture align in percentage.
y	2	double	singular	The y aperture align in percentage.

Message ElectronColumnServiceGetBeamBlankerStateRequest

The ElectronColumnServiceGetBeamBlankerStateRequest class.

Message ElectronColumnServiceGetBeamBlankerStateResponse

Response object representing the beam blanker.

Field	Number	Type	Presence	Description
is_beam_blanked	1	bool	singular	A value indicating whether the beam is blanked.

Message ElectronColumnServiceGetBeamShiftLimitsRequest

The ElectronColumnServiceGetBeamShiftLimitsRequest class.

Message ElectronColumnServiceGetBeamShiftLimitsResponse

Response object representing the beam shift limits.

Field	Number	Type	Presence	Description
beam_shift_xmin	1	double	singular	The minimum beam shift X in meters.
beam_shift_xmax	2	double	singular	The maximum beam shift X in meters.
beam_shift_ymin	3	double	singular	The minimum beam shift Y in meters.
beam_shift_ymax	4	double	singular	The maximum beam shift Y in meters.

Message ElectronColumnServiceGetBeamShiftRequest

The ElectronColumnServiceGetBeamShiftRequest class.

Message ElectronColumnServiceGetBeamShiftResponse

Response object describing the beam shift values.

Field	Number	Type	Presence	Description
shift_x	1	double	singular	The x beam shift in meters.
shift_y	2	double	singular	The y beam shift in meters.

Message ElectronColumnServiceGetBeamStateRequest

The ElectronColumnServiceGetBeamStateRequest class.

Message ElectronColumnServiceGetBeamStateResponse

BeamState enum wrapper.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.BeamState	singular	The beam state.
task_success	2	bool	singular	A value indicating whether the task to change beam state succeeded or not.

Message ElectronColumnServiceGetBoosterVoltageRequest

The ElectronColumnServiceGetBoosterVoltageRequest class.

Message ElectronColumnServiceGetBoosterVoltageResponse

Response object representing the booster voltage.

Field	Number	Type	Presence	Description
booster_voltage	1	double	singular	The booster voltage in volts.
success	2	bool	singular	A value indicating whether getting the booster voltage was successful.

Message ElectronColumnServiceGetEhtOffsetLimitsRequest

The ElectronColumnServiceGetEhtOffsetLimitsRequest class.

Message ElectronColumnServiceGetEhtOffsetLimitsResponse

Response object representing the eht offset response.

Field	Number	Type	Presence	Description
minimum	1	double	singular	The minimum eht offset in volts.
maximum	2	double	singular	The maximum eht offset in volts.
success	3	bool	singular	A value indicating whether geetting the eht offset limits was successful.

Message ElectronColumnServiceGetEhtOffsetRequest

The ElectronColumnServiceGetEhtOffsetRequest class.

Message ElectronColumnServiceGetEhtOffsetResponse

Response object representing the eht offset.

Field	Number	Type	Presence	Description
eht_offset	1	double	singular	The eht offset in volts.
success	2	bool	singular	A value indicating whether gets or sets of the eht offset was successful.

Message ElectronColumnServiceGetFocusLimitsRequest

The ElectronColumnServiceGetFocusLimitsRequest class.

Message ElectronColumnServiceGetFocusLimitsResponse

Response object representing the column focus.

Field	Number	Type	Presence	Description
focus_min	1	double	singular	The minimum focus in meters.
focus_max	2	double	singular	The maximum focus in meters.

Message ElectronColumnServiceGetFocusRequest

The ElectronColumnServiceGetFocusRequest class.

Message ElectronColumnServiceGetFocusResponse

Response object representing the column focus.

Field	Number	Type	Presence	Description
focus	1	double	singular	The focus in meters.

Message ElectronColumnServiceGetFovLimitsRequest

The ElectronColumnServiceGetFovLimitsRequest class.

Message ElectronColumnServiceGetFovLimitsResponse

Response object representing the field of view limits.

Field	Number	Type	Presence	Description
minimum	1	double	singular	The minimum field of view in meters.
maximum	2	double	singular	The maximum field of view in meters.

Message ElectronColumnServiceGetFovRequest

The ElectronColumnServiceGetFovRequest class.

Message ElectronColumnServiceGetFovResponse

Response object representing the field of view expansion.

Field	Number	Type	Presence	Description
fov	1	double	singular	The fov expansion in meters.

Message ElectronColumnServiceGetFovRotationLimitsRequest

The ElectronColumnServiceGetFovRotationLimitsRequest class.

Message ElectronColumnServiceGetFovRotationLimitsResponse

Response object representing the field of view rotation limits.

Field	Number	Type	Presence	Description
minimum	1	double	singular	The minimum field of view rotation in radians.
maximum	2	double	singular	The maximum field of view rotation in radians.

Message ElectronColumnServiceGetFovRotationRequest

The ElectronColumnServiceGetFovRotationRequest class.

Message ElectronColumnServiceGetFovRotationResponse

Response object representing the field of view rotation.

Field	Number	Type	Presence	Description
rotation	1	double	singular	The field of view rotation in radians.

Message ElectronColumnServiceGetObjectiveCurrentRequest

The ElectronColumnServiceGetObjectiveCurrentRequest class.

Message ElectronColumnServiceGetObjectiveCurrentResponse

Response object representing the objective current.

Field	Number	Type	Presence	Description
objective_current	1	double	singular	The objective current in amperes.
success	2	bool	singular	A value indicating whether getting the objective current was successful.

Message ElectronColumnServiceGetProbeCurrentRequest

The ElectronColumnServiceGetProbeCurrentRequest class.

Message ElectronColumnServiceGetProbeCurrentResponse

Response object representing the probe current.

Field	Number	Type	Presence	Description
probe_current	1	double	singular	The probe current value in Amps.

Message ElectronColumnServiceGetSemiAngleRequest

The ElectronColumnServiceGetSemiAngleRequest class.

Message ElectronColumnServiceGetSemiAngleResponse

Response object describing the semi angle value.

Field	Number	Type	Presence	Description
angle	1	double	singular	The semi angle in radians.

Message ElectronColumnServiceGetSpotSizeRequest

The ElectronColumnServiceGetSpotSizeRequest class.

Message ElectronColumnServiceGetSpotSizeResponse

Response object representing the spot size.

Field	Number	Type	Presence	Description
spot_size	1	double	singular	The spot size in meters.

Message ElectronColumnServiceGetStigmatorRequest

The ElectronColumnServiceGetStigmatorRequest class.

Message ElectronColumnServiceGetStigmatorResponse

Response object representing the stigmator value of the electron column.

Field	Number	Type	Presence	Description
stigmator_x	1	double	singular	The stigmator x in percent [0,1].
stigmator_y	2	double	singular	The stigmator y in percent [0,1].

Message ElectronColumnServiceGetTargetVoltageRequest

The ElectronColumnServiceGetTargetVoltageRequest class.

Message ElectronColumnServiceGetTargetVoltageResponse

Response object representing the eht/voltage.

Field	Number	Type	Presence	Description
voltage	1	double	singular	The eht/voltage in volts.

Message ElectronColumnServiceGetVoltageLimitsRequest

The ElectronColumnServiceGetVoltageLimitsRequest class.

Message ElectronColumnServiceGetVoltageLimitsResponse

Response object representing the voltage limits.

Field	Number	Type	Presence	Description
minimum	1	double	singular	The minimum voltage in volts.
maximum	2	double	singular	The maximum voltage in volts.

Message ElectronColumnServiceGoToStandbyRequest

The ElectronColumnServiceGoToStandbyRequest class.

Message ElectronColumnServiceGoToStandbyResponse

BeamState enum wrapper.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.BeamState	singular	The beam state.
task_success	2	bool	singular	A value indicating whether the task to change beam state succeeded or not.

Message ElectronColumnServiceRegisterOnApertureAlignChangedRequest

The ElectronColumnServiceRegisterOnApertureAlignChangedRequest class.

Message ElectronColumnServiceRegisterOnApertureAlignChangedResponse

Response object describing the aperture align values.

Field	Number	Type	Presence	Description
x	1	double	singular	The x aperture align in percentage.
y	2	double	singular	The y aperture align in percentage.

Message ElectronColumnServiceRegisterOnBeamBlankerStateChangedRequest

The ElectronColumnServiceRegisterOnBeamBlankerStateChangedRequest class.

Message ElectronColumnServiceRegisterOnBeamBlankerStateChangedResponse

Response object representing the beam blanker.

Field	Number	Type	Presence	Description
is_beam_blanked	1	bool	singular	A value indicating whether the beam is blanked.

Message ElectronColumnServiceRegisterOnBeamShiftChangedRequest

The ElectronColumnServiceRegisterOnBeamShiftChangedRequest class.

Message ElectronColumnServiceRegisterOnBeamShiftChangedResponse

Response object describing the beam shift values.

Field	Number	Type	Presence	Description
shift_x	1	double	singular	The x beam shift in meters.
shift_y	2	double	singular	The y beam shift in meters.

Message ElectronColumnServiceRegisterOnBeamStateChangedRequest

The ElectronColumnServiceRegisterOnBeamStateChangedRequest class.

Message ElectronColumnServiceRegisterOnBeamStateChangedResponse

BeamState enum wrapper.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.BeamState	singular	The beam state.
task_success	2	bool	singular	A value indicating whether the task to change beam state succeeded or not.

Message ElectronColumnServiceRegisterOnFocusChangedRequest

The ElectronColumnServiceRegisterOnFocusChangedRequest class.

Message ElectronColumnServiceRegisterOnFocusChangedResponse

Response object representing the column focus.

Field	Number	Type	Presence	Description
focus	1	double	singular	The focus in meters.

Message ElectronColumnServiceRegisterOnFovChangedRequest

The ElectronColumnServiceRegisterOnFovChangedRequest class.

Message ElectronColumnServiceRegisterOnFovChangedResponse

Response object representing the field of view expansion.

Field	Number	Type	Presence	Description
fov	1	double	singular	The fov expansion in meters.

Message ElectronColumnServiceRegisterOnFovRotationChangedRequest

The ElectronColumnServiceRegisterOnFovRotationChangedRequest class.

Message ElectronColumnServiceRegisterOnFovRotationChangedResponse

Response object representing the field of view rotation.

Field	Number	Type	Presence	Description
rotation	1	double	singular	The field of view rotation in radians.

Message ElectronColumnServiceRegisterOnProbeCurrentChangedRequest

The ElectronColumnServiceRegisterOnProbeCurrentChangedRequest class.

Message ElectronColumnServiceRegisterOnProbeCurrentChangedResponse

Response object representing the probe current.

Field	Number	Type	Presence	Description
probe_current	1	double	singular	The probe current value in Amps.

Message ElectronColumnServiceRegisterOnSemiAngleChangedRequest

The ElectronColumnServiceRegisterOnSemiAngleChangedRequest class.

Message ElectronColumnServiceRegisterOnSemiAngleChangedResponse

Response object describing the semi angle values.

Field	Number	Type	Presence	Description
angle	1	double	singular	The semi angle in radians.

Message ElectronColumnServiceRegisterOnSpotSizeChangedRequest

The ElectronColumnServiceRegisterOnSpotSizeChangedRequest class.

Message ElectronColumnServiceRegisterOnSpotSizeChangedResponse

Response object representing the spot size.

Field	Number	Type	Presence	Description
spot_size	1	double	singular	The spot size in meters.

Message ElectronColumnServiceRegisterOnStigmatorChangedRequest

The ElectronColumnServiceRegisterOnStigmatorChangedRequest class.

Message ElectronColumnServiceRegisterOnStigmatorChangedResponse

Response object representing stigmator changes of the electron column.

Field	Number	Type	Presence	Description
stigmator_x	1	double	singular	The stigmator x in percent [0,1].
stigmator_y	2	double	singular	The stigmator y in percent [0,1].

Message ElectronColumnServiceRegisterOnVoltageChangedRequest

The ElectronColumnServiceRegisterOnVoltageChangedRequest class.

Message ElectronColumnServiceRegisterOnVoltageChangedResponse

Response object representing the eht/voltage.

Field	Number	Type	Presence	Description
voltage	1	double	singular	The eht/voltage in volts.

Message ElectronColumnServiceSetApertureAlignRequest

The ElectronColumnServiceSetApertureAlignRequest class.

Field	Number	Type	Presence	Description
x	1	google.protobuf.DoubleValue	singular	The new aperture align x in percentage. null if it should not be changed.
y	2	google.protobuf.DoubleValue	singular	The new aperture align y in percentage. null if it should not be changed.

Message ElectronColumnServiceSetApertureAlignResponse

Response object describing the aperture align values.

Field	Number	Type	Presence	Description
x	1	double	singular	The x aperture align in percentage.
y	2	double	singular	The y aperture align in percentage.
success	3	bool	singular	A value indicating whether setting of the aperture alignment was successful.

Message ElectronColumnServiceSetBeamBlankerStateRequest

The ElectronColumnServiceSetBeamBlankerStateRequest class.

Field	Number	Type	Presence	Description
blank_beam	1	bool	singular	True blanks beam, false unblanks beam.

Message ElectronColumnServiceSetBeamBlankerStateResponse

Response object representing the electron column beam blanker.

Field	Number	Type	Presence	Description
beam_blanked	1	bool	singular	The beam blanker.

Message ElectronColumnServiceSetBeamShiftRequest

The ElectronColumnServiceSetBeamShiftRequest class.

Field	Number	Type	Presence	Description
xshift	1	google.protobuf.DoubleValue	singular	The new beam shift x in meters. null if it should not be changed.
yshift	2	google.protobuf.DoubleValue	singular	The new beam shift y in meters. null if it should not be changed.

Message ElectronColumnServiceSetBeamShiftResponse

Response object describing the beam shift values.

Field	Number	Type	Presence	Description
shift_x	1	double	singular	The x beam shift in meters.
shift_y	2	double	singular	The y beam shift in meters.

Message ElectronColumnServiceSetEhtOffsetRequest

The ElectronColumnServiceSetEhtOffsetRequest class.

Field	Number	Type	Presence	Description
eht_offset	1	double	singular	The eht offset.

Message ElectronColumnServiceSetEhtOffsetResponse

Response object representing the eht offset response.

Field	Number	Type	Presence	Description
eht_offset	1	double	singular	The eht offset in volts.
success	2	bool	singular	A value indicating whether gets or sets of the eht offset was successful.

Message ElectronColumnServiceSetFocusRequest

The ElectronColumnServiceSetFocusRequest class.

Field	Number	Type	Presence	Description
focus	1	double	singular	The new focus in meters.

Message ElectronColumnServiceSetFocusResponse

Response object representing the column focus.

Field	Number	Type	Presence	Description
focus	1	double	singular	The focus in meters.

Message ElectronColumnServiceSetFovRequest

The ElectronColumnServiceSetFovRequest class.

Field	Number	Type	Presence	Description
fov	1	double	singular	The size of the new FOV in meters.

Message ElectronColumnServiceSetFovResponse

Response object representing the field of view expansion.

Field	Number	Type	Presence	Description
fov	1	double	singular	The fov expansion in meters.

Message ElectronColumnServiceSetFovRotationRequest

The ElectronColumnServiceSetFovRotationRequest class.

Field	Number	Type	Presence	Description
fov_rotation	1	double	singular	The rotation in radians, clockwise.

Message ElectronColumnServiceSetFovRotationResponse

Response object representing the field of view rotation.

Field	Number	Type	Presence	Description
rotation	1	double	singular	The field of view rotation in radians.

Message ElectronColumnServiceSetObjectiveCurrentRequest

The ElectronColumnServiceSetObjectiveCurrentRequest class.

Field	Number	Type	Presence	Description
objective_current	1	double	singular	The objective current in amperes.

Message ElectronColumnServiceSetObjectiveCurrentResponse

Response object representing the objective current response.

Field	Number	Type	Presence	Description
objective_current	1	double	singular	The ObjectiveCurrent in amperes.
success	2	bool	singular	A value indicating whether setting the objective current was successful.

Message ElectronColumnServiceSetProbeCurrentRequest

The ElectronColumnServiceSetProbeCurrentRequest class.

Field	Number	Type	Presence	Description
current_amps	1	double	singular	Probe current in Ampere.

Message ElectronColumnServiceSetProbeCurrentResponse

Response object representing the probe current.

Field	Number	Type	Presence	Description
success	1	bool	singular	A value indicating whether setting the probe current was successful.
probe_current	2	double	singular	The probe current value in Amps.

Message ElectronColumnServiceSetStigmatorRequest

The ElectronColumnServiceSetStigmatorRequest class.

Field	Number	Type	Presence	Description
stigmator_x	1	google.protobuf.DoubleValue	singular	The stigmator x value in percent [0, 1] or null if is not supposed to change.
stigmator_y	2	google.protobuf.DoubleValue	singular	The stigmator y value in percent [0, 1] or null if is not supposed to change.

Message ElectronColumnServiceSetStigmatorResponse

Response object representing the stigmator set value.

Field	Number	Type	Presence	Description
stigmator_x	1	double	singular	The stigmator x in percent [0,1].
stigmator_y	2	double	singular	The stigmator y in percent [0,1].

Message ElectronColumnServiceSetVoltageRequest

The ElectronColumnServiceSetVoltageRequest class.

Field	Number	Type	Presence	Description
voltage	1	double	singular	The new eht/voltage in volts.

Message ElectronColumnServiceSetVoltageResponse

Response object representing the eht/voltage.

Field	Number	Type	Presence	Description
voltage	1	double	singular	The eht/voltage in volts.

Message ElectronColumnServiceTurnOffRequest

The ElectronColumnServiceTurnOffRequest class.

Message ElectronColumnServiceTurnOffResponse

BeamState enum wrapper.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.BeamState	singular	The beam state.
task_success	2	bool	singular	A value indicating whether the task to change beam state succeeded or not.

Message ElectronColumnServiceTurnOnRequest

The ElectronColumnServiceTurnOnRequest class.

Message ElectronColumnServiceTurnOnResponse

BeamState enum wrapper.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.BeamState	singular	The beam state.
task_success	2	bool	singular	A value indicating whether the task to change beam state succeeded or not.