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zen_api/em/workflow/v1/create_workflow_service.proto#

Version: 2026.5.1

Package: zen_api.em.workflow.v1

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Service CreateWorkflowService#

The ICreateWorkflowService interface.

AddAbsoluteTiltingAction#

Creates an absolute tilting action.

rpc AddAbsoluteTiltingAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddAbsoluteTiltingActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddAbsoluteTiltingActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddAbsoluteTiltingActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddAbsoluteTiltingActionResponse

AddAcquireNavCamImageAction#

Creates an action to acquire a navigation camera image for a specified region of interest in an automated engine workflow. This method generates an action for capturing a NavCam image based on the provided EM region of interest and appends it to an existing workflow.

rpc AddAcquireNavCamImageAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireNavCamImageActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireNavCamImageActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireNavCamImageActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireNavCamImageActionResponse

AddAcquireStoreImageAction#

Creates an action to acquire and store an image based on a specified region of interest in an automated engine workflow. This method generates an action for capturing and storing an image, including optional position and offset parameters, and appends it to an existing workflow.

rpc AddAcquireStoreImageAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireStoreImageActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireStoreImageActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireStoreImageActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddAcquireStoreImageActionResponse

AddChangeBeamStateAction#

Creates an action to change the beam state in an automated engine workflow. This method generates a beam state change action based on the desired state and appends it to an existing workflow.

rpc AddChangeBeamStateAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeBeamStateActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeBeamStateActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeBeamStateActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeBeamStateActionResponse

AddChangeCurrentAction#

Creates an action to change the current level in an automated engine workflow. This method generates a current change action based on the specified target current and appends it to an existing workflow.

rpc AddChangeCurrentAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeCurrentActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeCurrentActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeCurrentActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeCurrentActionResponse

AddChangeEhtAction#

Creates an action to change the EHT voltage in an automated engine workflow. This method generates an EHT voltage change action and appends it to an existing workflow.

rpc AddChangeEhtAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeEhtActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeEhtActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeEhtActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddChangeEhtActionResponse

AddEdsAcquisitionSettingsParameterAction#

Creates an action to set Energy-Dispersive X-ray Spectroscopy (EDS) acquisition settings in an automated engine workflow. This method generates an action for configuring EDS acquisition settings and appends it to an existing workflow.

rpc AddEdsAcquisitionSettingsParameterAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionResponse

AddFocusAndFovAction#

Creates an action to adjust the focus and field of view (FOV) in an automated engine workflow. This method generates an action for setting focus and FOV values, and appends it to an existing workflow.

rpc AddFocusAndFovAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddFocusAndFovActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddFocusAndFovActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddFocusAndFovActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddFocusAndFovActionResponse

AddGoToStoredPositionAction#

Adds an action that moves the stage to a stored point.

rpc AddGoToStoredPositionAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddGoToStoredPositionActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddGoToStoredPositionActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddGoToStoredPositionActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddGoToStoredPositionActionResponse

AddInitializeAction#

Add action that initializes the stage.

rpc AddInitializeAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddInitializeActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddInitializeActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddInitializeActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddInitializeActionResponse

AddMoveStageRelativeAction#

Add Move Stage Relative action to the specified workflow. The action will be added at the last position of the specified workflow. When specified workflow is not present, it will be automatically created.

rpc AddMoveStageRelativeAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddMoveStageRelativeActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddMoveStageRelativeActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddMoveStageRelativeActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddMoveStageRelativeActionResponse

AddPositionControlledTiltAction#

Creates a position-controlled tilt action as part of an automated engine workflow. This method generates an action based on specified tilt angles and step sizes, and appends it to a given workflow. When specified workflow is not present, it will be automatically created.

rpc AddPositionControlledTiltAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddPositionControlledTiltActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddPositionControlledTiltActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddPositionControlledTiltActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddPositionControlledTiltActionResponse

AddRestoreFibProbeAction#

Creates an action to restore the FIB probe to a previously stored state in an automated engine workflow. This method generates an action for restoring the FIB probe configuration from a named storage and appends it to an existing workflow.

rpc AddRestoreFibProbeAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddRestoreFibProbeActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddRestoreFibProbeActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddRestoreFibProbeActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddRestoreFibProbeActionResponse

AddSetFibProbeAction#

Creates an action to set a specific FIB probe in an automated engine workflow. This method generates an action to configure the FIB system to use a specified probe and appends it to an existing workflow.

rpc AddSetFibProbeAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibProbeActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibProbeActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibProbeActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibProbeActionResponse

AddSetFibWithValuesAction#

Creates an action to set the FIB with specified voltage and current values in an automated engine workflow. This method generates an action for setting the FIB parameters and appends it to an existing workflow.

rpc AddSetFibWithValuesAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibWithValuesActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibWithValuesActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibWithValuesActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetFibWithValuesActionResponse

AddSetVacuumParameterAction#

Creates an action to set a specific vacuum parameter in an automated engine workflow. This method generates an action to adjust a vacuum parameter to a specified value and appends it to an existing workflow.

rpc AddSetVacuumParameterAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetVacuumParameterActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddSetVacuumParameterActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetVacuumParameterActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddSetVacuumParameterActionResponse

AddSpotParameterAction#

Creates an action to set parameters for a specific spot in an automated engine workflow. This method generates an action to configure a beam spot with a given ID and beam position, using specified X and Y coordinates, and appends it to an existing workflow.

rpc AddSpotParameterAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddSpotParameterActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddSpotParameterActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddSpotParameterActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddSpotParameterActionResponse

AddStoreFibProbeAction#

Creates an action to store the current state of the FIB probe in an automated engine workflow. This method generates an action for storing the FIB probe configuration and appends it to an existing workflow.

rpc AddStoreFibProbeAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddStoreFibProbeActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddStoreFibProbeActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddStoreFibProbeActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddStoreFibProbeActionResponse

AddTouchAlarmGeneratorAction#

Creates an action to enable or disable the touch alarm in an automated engine workflow. This method generates an action for toggling the touch alarm state and appends it to an existing workflow.

rpc AddTouchAlarmGeneratorAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddTouchAlarmGeneratorActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddTouchAlarmGeneratorActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddTouchAlarmGeneratorActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddTouchAlarmGeneratorActionResponse

AddVacuumCommandAction#

Creates an action to send a vacuum command in an automated engine workflow. This method generates an action for sending a specified vacuum command and appends it to an existing workflow.

rpc AddVacuumCommandAction (zen_api.em.workflow.v1.CreateWorkflowServiceAddVacuumCommandActionRequest) returns (zen_api.em.workflow.v1.CreateWorkflowServiceAddVacuumCommandActionResponse);

Request: zen_api.em.workflow.v1.CreateWorkflowServiceAddVacuumCommandActionRequest

Response: zen_api.em.workflow.v1.CreateWorkflowServiceAddVacuumCommandActionResponse

Message CreateWorkflowServiceAddAbsoluteTiltingActionRequest#

The CreateWorkflowServiceAddAbsoluteTiltingActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
tilt_angle 2 double singular The angle in degrees to which the tilting should occur. Defaults to 0 if not specified.

Message CreateWorkflowServiceAddAbsoluteTiltingActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddAcquireNavCamImageActionRequest#

The CreateWorkflowServiceAddAcquireNavCamImageActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
em_region_of_interest 2 zen_api.em.workflow.v1.EmRegionOfInterest singular An ZenApi.EM.Workflow.V1.EmRegionOfInterest object specifying the region of interest for the NavCam image acquisition.
file_name 3 string singular The name of the file where the acquired NavCam image will be saved.

Message CreateWorkflowServiceAddAcquireNavCamImageActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddAcquireStoreImageActionRequest#

The CreateWorkflowServiceAddAcquireStoreImageActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
em_region_of_interest 2 zen_api.em.workflow.v1.EmRegionOfInterest singular An ZenApi.EM.Workflow.V1.EmRegionOfInterest object specifying the region of interest for the image acquisition.
image_key 3 string singular A unique key identifier for the image to be stored.
position_name 4 string singular An optional name for the position associated with the image acquisition. Default is an empty string.
xoffset 5 double singular An optional X-coordinate offset for the image acquisition. Default is System.Double.NaN.
yoffset 6 double singular An optional Y-coordinate offset for the image acquisition. Default is System.Double.NaN.
file_name 7 string singular An optional file name for storing the acquired image. Default is an empty string.

Message CreateWorkflowServiceAddAcquireStoreImageActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddChangeBeamStateActionRequest#

The CreateWorkflowServiceAddChangeBeamStateActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
desired_state 2 zen_api.em.hardware.v1.BeamState singular The desired state of the beam, specified as a ZenApi.EM.Hardware.V1.BeamState enumeration.

Message CreateWorkflowServiceAddChangeBeamStateActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddChangeCurrentActionRequest#

The CreateWorkflowServiceAddChangeCurrentActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
target_current 2 double singular The target current level to which the current should be adjusted.

Message CreateWorkflowServiceAddChangeCurrentActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddChangeEhtActionRequest#

The CreateWorkflowServiceAddChangeEhtActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
target_voltage 2 double singular The target voltage level to which the EHT should be changed.

Message CreateWorkflowServiceAddChangeEhtActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionRequest#

The CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular The unique identifier of the workflow to which the EDS acquisition settings action will be appended.
acquisition_settings 2 zen_api.em.workflow.v1.EdsSpectrumAcquisitionSettings singular The EDS acquisition settings to be applied, provided as an ZenApi.EM.Workflow.V1.EdsSpectrumAcquisitionSettings interface.

Message CreateWorkflowServiceAddEdsAcquisitionSettingsParameterActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddFocusAndFovActionRequest#

The CreateWorkflowServiceAddFocusAndFovActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
focus 2 double singular The focus value to be set.
fov 3 double singular The field of view value to be set.
is_sem 4 bool singular A boolean indicating whether the setting is for a SEM (true) or not (false).

Message CreateWorkflowServiceAddFocusAndFovActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddGoToStoredPositionActionRequest#

The CreateWorkflowServiceAddGoToStoredPositionActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
id 2 int32 singular Id of the stage position stored.

Message CreateWorkflowServiceAddGoToStoredPositionActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddInitializeActionRequest#

The CreateWorkflowServiceAddInitializeActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.

Message CreateWorkflowServiceAddInitializeActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddMoveStageRelativeActionRequest#

The CreateWorkflowServiceAddMoveStageRelativeActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
axis_to_move 2 zen_api.hardware.v1.StageAxis repeated The stage axis that should move.
The position is in meters.

Message CreateWorkflowServiceAddMoveStageRelativeActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddPositionControlledTiltActionRequest#

The CreateWorkflowServiceAddPositionControlledTiltActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
start_angle 2 double singular The starting angle in degrees for the tilt action.
target_angle 3 double singular The target angle in degrees the tilt action aims to reach.
large_step 4 double singular The size of the large step in degrees for tilting.
small_step 5 double singular The size of the small step in degrees for finer tilting adjustments.

Message CreateWorkflowServiceAddPositionControlledTiltActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddRestoreFibProbeActionRequest#

The CreateWorkflowServiceAddRestoreFibProbeActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
fib_probe_storage_name 2 string singular The name of the storage location from which the FIB probe state will be restored.

Message CreateWorkflowServiceAddRestoreFibProbeActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddSetFibProbeActionRequest#

The CreateWorkflowServiceAddSetFibProbeActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
probe_name 2 string singular The name of the FIB probe to be set.

Message CreateWorkflowServiceAddSetFibProbeActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddSetFibWithValuesActionRequest#

The CreateWorkflowServiceAddSetFibWithValuesActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
voltage 2 string singular The voltage value to set for the FIB.
current 3 string singular The current value to set for the FIB.

Message CreateWorkflowServiceAddSetFibWithValuesActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddSetVacuumParameterActionRequest#

The CreateWorkflowServiceAddSetVacuumParameterActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
vacuum_parameter 2 zen_api.em.workflow.v1.VacuumParameter singular The vacuum parameter to be set, specified as a ZenApi.EM.Workflow.V1.VacuumParameter enumeration.
value 3 double singular The value to which the specified vacuum parameter should be set.

Message CreateWorkflowServiceAddSetVacuumParameterActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddSpotParameterActionRequest#

The CreateWorkflowServiceAddSpotParameterActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
spot_id 2 string singular The identifier of the spot to be configured.
position_x 3 double singular The X-coordinate of the beam position for the spot.
position_y 4 double singular The Y-coordinate of the beam position for the spot.

Message CreateWorkflowServiceAddSpotParameterActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddStoreFibProbeActionRequest#

The CreateWorkflowServiceAddStoreFibProbeActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
fib_probe_storage_name 2 string singular The name for the storage location of the FIB probe state.

Message CreateWorkflowServiceAddStoreFibProbeActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddTouchAlarmGeneratorActionRequest#

The CreateWorkflowServiceAddTouchAlarmGeneratorActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
disable_alarm 2 bool singular A boolean indicating whether to disable (true) or enable (false) the touch alarm.

Message CreateWorkflowServiceAddTouchAlarmGeneratorActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.

Message CreateWorkflowServiceAddVacuumCommandActionRequest#

The CreateWorkflowServiceAddVacuumCommandActionRequest class.

Field Number Type Presence Description
workflow_id 1 string singular Identifier of the workflow to which action should be added.
command 2 string singular The vacuum command to be sent.

Message CreateWorkflowServiceAddVacuumCommandActionResponse#

ActionResponse response.

Field Number Type Presence Description
action_id 1 string singular The action id which was created.