zen_api/em/hardware/v1/vacuum_service.proto

Version: 2026.5.1

Package: zen_api.em.hardware.v1

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Service VacuumService

The IVacuumService interface.

CloseValve

Closes a valve on the system.

rpc CloseValve (zen_api.em.hardware.v1.VacuumServiceCloseValveRequest) returns (zen_api.em.hardware.v1.VacuumServiceCloseValveResponse);

Request: zen_api.em.hardware.v1.VacuumServiceCloseValveRequest

Response: zen_api.em.hardware.v1.VacuumServiceCloseValveResponse

GetAvailableVacuumModes

Retrieves a collection of available vacuum modes, like HV and VP. Available modes depend on the tool configuration and don't change during runtime. Note: TargetChamberPressure functionality is only working for VP mode.

rpc GetAvailableVacuumModes (zen_api.em.hardware.v1.VacuumServiceGetAvailableVacuumModesRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetAvailableVacuumModesResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetAvailableVacuumModesRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetAvailableVacuumModesResponse

GetAvailableValves

Retrieves all available valves of the system that can be controlled. Possible values are listed in ZenApi.EM.Hardware.V1.Valve enumeration.

rpc GetAvailableValves (zen_api.em.hardware.v1.VacuumServiceGetAvailableValvesRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetAvailableValvesResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetAvailableValvesRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetAvailableValvesResponse

GetChamberPressure

Retrieves the current chamber pressure in [pascal].

rpc GetChamberPressure (zen_api.em.hardware.v1.VacuumServiceGetChamberPressureRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetChamberPressureResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetChamberPressureRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetChamberPressureResponse

GetTargetChamberPressure

Retrieves the target chamber pressure for ZenApi.EM.Hardware.V1.VacuumMode.VariablePressure mode. Unspecified return value on non VP configurations.

rpc GetTargetChamberPressure (zen_api.em.hardware.v1.VacuumServiceGetTargetChamberPressureRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetTargetChamberPressureResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetTargetChamberPressureRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetTargetChamberPressureResponse

GetVacuumMode

Retrieves the currently active Vacuum Mode.

rpc GetVacuumMode (zen_api.em.hardware.v1.VacuumServiceGetVacuumModeRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetVacuumModeResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetVacuumModeRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetVacuumModeResponse

GetVacuumState

Retrieves the current vacuum state.

rpc GetVacuumState (zen_api.em.hardware.v1.VacuumServiceGetVacuumStateRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetVacuumStateResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetVacuumStateRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetVacuumStateResponse

GetValveState

Retrieves the current state of a valve. Only states of available valves are defined. See ZenApi.EM.Hardware.V1.IVacuumApi.GetAvailableValves.

rpc GetValveState (zen_api.em.hardware.v1.VacuumServiceGetValveStateRequest) returns (zen_api.em.hardware.v1.VacuumServiceGetValveStateResponse);

Request: zen_api.em.hardware.v1.VacuumServiceGetValveStateRequest

Response: zen_api.em.hardware.v1.VacuumServiceGetValveStateResponse

OpenValve

Opens a valve on the system.

rpc OpenValve (zen_api.em.hardware.v1.VacuumServiceOpenValveRequest) returns (zen_api.em.hardware.v1.VacuumServiceOpenValveResponse);

Request: zen_api.em.hardware.v1.VacuumServiceOpenValveRequest

Response: zen_api.em.hardware.v1.VacuumServiceOpenValveResponse

Pump

Starts the pumping process to evacuate the chamber and install a stable vacuum.

rpc Pump (zen_api.em.hardware.v1.VacuumServicePumpRequest) returns (zen_api.em.hardware.v1.VacuumServicePumpResponse);

Request: zen_api.em.hardware.v1.VacuumServicePumpRequest

Response: zen_api.em.hardware.v1.VacuumServicePumpResponse

RegisterOnChamberPressureChanged

Notifications on chamber pressure. Events are fired every time the current chamber pressure changes.

rpc RegisterOnChamberPressureChanged (zen_api.em.hardware.v1.VacuumServiceRegisterOnChamberPressureChangedRequest) returns (stream zen_api.em.hardware.v1.VacuumServiceRegisterOnChamberPressureChangedResponse);

Request: zen_api.em.hardware.v1.VacuumServiceRegisterOnChamberPressureChangedRequest

Response: zen_api.em.hardware.v1.VacuumServiceRegisterOnChamberPressureChangedResponse

RegisterOnTargetChamberPressureChanged

Notifications about changes to the target chamber pressure value. Only enabled on systems supporting ZenApi.EM.Hardware.V1.VacuumMode.VariablePressure mode.

rpc RegisterOnTargetChamberPressureChanged (zen_api.em.hardware.v1.VacuumServiceRegisterOnTargetChamberPressureChangedRequest) returns (stream zen_api.em.hardware.v1.VacuumServiceRegisterOnTargetChamberPressureChangedResponse);

Request: zen_api.em.hardware.v1.VacuumServiceRegisterOnTargetChamberPressureChangedRequest

Response: zen_api.em.hardware.v1.VacuumServiceRegisterOnTargetChamberPressureChangedResponse

RegisterOnVacuumModeChanged

Notification about changes of the active vacuum mode. See ZenApi.EM.Hardware.V1.VacuumMode.

rpc RegisterOnVacuumModeChanged (zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumModeChangedRequest) returns (stream zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumModeChangedResponse);

Request: zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumModeChangedRequest

Response: zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumModeChangedResponse

RegisterOnVacuumStateChanged

Notification about changes of the vacuum system state. See ZenApi.EM.Hardware.V1.VacuumState.

rpc RegisterOnVacuumStateChanged (zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumStateChangedRequest) returns (stream zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumStateChangedResponse);

Request: zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumStateChangedRequest

Response: zen_api.em.hardware.v1.VacuumServiceRegisterOnVacuumStateChangedResponse

RegisterOnValveStateChanged

Notifications about any valves state changes.

rpc RegisterOnValveStateChanged (zen_api.em.hardware.v1.VacuumServiceRegisterOnValveStateChangedRequest) returns (stream zen_api.em.hardware.v1.VacuumServiceRegisterOnValveStateChangedResponse);

Request: zen_api.em.hardware.v1.VacuumServiceRegisterOnValveStateChangedRequest

Response: zen_api.em.hardware.v1.VacuumServiceRegisterOnValveStateChangedResponse

SetTargetChamberPressure

Sets and if in ZenApi.EM.Hardware.V1.VacuumMode.VariablePressure also applies a new chamber pressure.

rpc SetTargetChamberPressure (zen_api.em.hardware.v1.VacuumServiceSetTargetChamberPressureRequest) returns (zen_api.em.hardware.v1.VacuumServiceSetTargetChamberPressureResponse);

Request: zen_api.em.hardware.v1.VacuumServiceSetTargetChamberPressureRequest

Response: zen_api.em.hardware.v1.VacuumServiceSetTargetChamberPressureResponse

SetVacuumMode

Sets the active vacuum mode. No op if the vacuum mode does not change, otherwise the process to switch to the other vacuum mode is initiated.

rpc SetVacuumMode (zen_api.em.hardware.v1.VacuumServiceSetVacuumModeRequest) returns (zen_api.em.hardware.v1.VacuumServiceSetVacuumModeResponse);

Request: zen_api.em.hardware.v1.VacuumServiceSetVacuumModeRequest

Response: zen_api.em.hardware.v1.VacuumServiceSetVacuumModeResponse

Vent

Starts the venting process to vent the chamber and allow the chamber door to be opened.

rpc Vent (zen_api.em.hardware.v1.VacuumServiceVentRequest) returns (zen_api.em.hardware.v1.VacuumServiceVentResponse);

Request: zen_api.em.hardware.v1.VacuumServiceVentRequest

Response: zen_api.em.hardware.v1.VacuumServiceVentResponse

Message VacuumServiceCloseValveRequest

The VacuumServiceCloseValveRequest class.

Field	Number	Type	Presence	Description
valve	1	zen_api.em.hardware.v1.Valve	singular	The valve identifier of the valve to close.

Message VacuumServiceCloseValveResponse

Response object of ZenApi.EM.Hardware.V1.IVacuumApi.CloseValve(ZenApi.EM.Hardware.V1.Valve,System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to close a valve succeeded or not.

Message VacuumServiceGetAvailableVacuumModesRequest

The VacuumServiceGetAvailableVacuumModesRequest class.

Message VacuumServiceGetAvailableVacuumModesResponse

AvailableVacuumModes enum collection response.

Field	Number	Type	Presence	Description
available_modes	1	zen_api.em.hardware.v1.VacuumMode	repeated

Message VacuumServiceGetAvailableValvesRequest

The VacuumServiceGetAvailableValvesRequest class.

Message VacuumServiceGetAvailableValvesResponse

AvailableValves enum collection response.

Field	Number	Type	Presence	Description
available_valves	1	zen_api.em.hardware.v1.Valve	repeated

Message VacuumServiceGetChamberPressureRequest

The VacuumServiceGetChamberPressureRequest class.

Message VacuumServiceGetChamberPressureResponse

Response to represent the chamber pressure.

Field	Number	Type	Presence	Description
pressure	1	double	singular	The chamber pressure in [pascal].

Message VacuumServiceGetTargetChamberPressureRequest

The VacuumServiceGetTargetChamberPressureRequest class.

Message VacuumServiceGetTargetChamberPressureResponse

Response to represent the chamber pressure.

Field	Number	Type	Presence	Description
pressure	1	double	singular	The chamber pressure in [pascal].

Message VacuumServiceGetVacuumModeRequest

The VacuumServiceGetVacuumModeRequest class.

Message VacuumServiceGetVacuumModeResponse

VacuumMode enum response.

Field	Number	Type	Presence	Description
mode	1	zen_api.em.hardware.v1.VacuumMode	singular	The vacuum mode.

Message VacuumServiceGetVacuumStateRequest

The VacuumServiceGetVacuumStateRequest class.

Message VacuumServiceGetVacuumStateResponse

VacuumState enum response.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.VacuumState	singular	The vacuum state.

Message VacuumServiceGetValveStateRequest

The VacuumServiceGetValveStateRequest class.

Field	Number	Type	Presence	Description
valve	1	zen_api.em.hardware.v1.Valve	singular	The valve to get the status of.

Message VacuumServiceGetValveStateResponse

ValveState enum response.

Field	Number	Type	Presence	Description
valve	1	zen_api.em.hardware.v1.Valve	singular	The valve identifier.
state	2	zen_api.em.hardware.v1.ValveState	singular	The valves state.

Message VacuumServiceOpenValveRequest

The VacuumServiceOpenValveRequest class.

Field	Number	Type	Presence	Description
valve	1	zen_api.em.hardware.v1.Valve	singular	The valve identifier of the valve to open.

Message VacuumServiceOpenValveResponse

Response object of ZenApi.EM.Hardware.V1.IVacuumApi.OpenValve(ZenApi.EM.Hardware.V1.Valve,System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to open a valve succeeded or not.

Message VacuumServicePumpRequest

The VacuumServicePumpRequest class.

Message VacuumServicePumpResponse

Response object of the ZenApi.EM.Hardware.V1.IVacuumApi.Pump(System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to pump the chamber succeeded or not.

Message VacuumServiceRegisterOnChamberPressureChangedRequest

The VacuumServiceRegisterOnChamberPressureChangedRequest class.

Message VacuumServiceRegisterOnChamberPressureChangedResponse

Response to represent the chamber pressure.

Field	Number	Type	Presence	Description
pressure	1	double	singular	The chamber pressure in [pascal].

Message VacuumServiceRegisterOnTargetChamberPressureChangedRequest

The VacuumServiceRegisterOnTargetChamberPressureChangedRequest class.

Message VacuumServiceRegisterOnTargetChamberPressureChangedResponse

Response to represent the chamber pressure.

Field	Number	Type	Presence	Description
pressure	1	double	singular	The chamber pressure in [pascal].

Message VacuumServiceRegisterOnVacuumModeChangedRequest

The VacuumServiceRegisterOnVacuumModeChangedRequest class.

Message VacuumServiceRegisterOnVacuumModeChangedResponse

VacuumMode enum response.

Field	Number	Type	Presence	Description
mode	1	zen_api.em.hardware.v1.VacuumMode	singular	The vacuum mode.

Message VacuumServiceRegisterOnVacuumStateChangedRequest

The VacuumServiceRegisterOnVacuumStateChangedRequest class.

Message VacuumServiceRegisterOnVacuumStateChangedResponse

VacuumState enum response.

Field	Number	Type	Presence	Description
state	1	zen_api.em.hardware.v1.VacuumState	singular	The vacuum state.

Message VacuumServiceRegisterOnValveStateChangedRequest

The VacuumServiceRegisterOnValveStateChangedRequest class.

Message VacuumServiceRegisterOnValveStateChangedResponse

ValveState enum response.

Field	Number	Type	Presence	Description
valve	1	zen_api.em.hardware.v1.Valve	singular	The valve identifier.
state	2	zen_api.em.hardware.v1.ValveState	singular	The valves state.

Message VacuumServiceSetTargetChamberPressureRequest

The VacuumServiceSetTargetChamberPressureRequest class.

Field	Number	Type	Presence	Description
target_pressure	1	double	singular	The target chamber pressure if in ZenApi.EM.Hardware.V1.VacuumMode.VariablePressure mode in [pascal].

Message VacuumServiceSetTargetChamberPressureResponse

Response object of the ZenApi.EM.Hardware.V1.IVacuumApi.SetTargetChamberPressure(System.Double,System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to set the chamber pressure succeeded or not.

Message VacuumServiceSetVacuumModeRequest

The VacuumServiceSetVacuumModeRequest class.

Field	Number	Type	Presence	Description
mode	1	zen_api.em.hardware.v1.VacuumMode	singular	The ZenApi.EM.Hardware.V1.VacuumMode to apply.

Message VacuumServiceSetVacuumModeResponse

Response object of the ZenApi.EM.Hardware.V1.IVacuumApi.SetVacuumMode(ZenApi.EM.Hardware.V1.VacuumMode,System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to set the vacuum mode succeeded or not.

Message VacuumServiceVentRequest

The VacuumServiceVentRequest class.

Message VacuumServiceVentResponse

Response object of ZenApi.EM.Hardware.V1.IVacuumApi.Vent(System.Threading.CancellationToken) method.

Field	Number	Type	Presence	Description
task_success	1	bool	singular	A value indicating whether the task to vent the chamber succeeded or not.